Invention Grant
- Patent Title: Tools and methods for producing nanoantenna electronic devices
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Application No.: US15447807Application Date: 2017-03-02
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Publication No.: US10580649B2Publication Date: 2020-03-03
- Inventor: W. Dennis Slafer
- Applicant: MicroContinuum Inc.
- Applicant Address: US MA Cambridge
- Assignee: MicroContinuum, Inc.
- Current Assignee: MicroContinuum, Inc.
- Current Assignee Address: US MA Cambridge
- Agency: Cesari and McKenna, LLP
- Main IPC: H01L21/027
- IPC: H01L21/027 ; H01L27/142 ; H01L31/18 ; H01L21/467 ; H01L21/311 ; H01L21/475 ; H01L21/3213 ; H01L21/308 ; H01L21/32 ; H01L21/47 ; H01L51/00 ; H01L31/0352 ; H01L31/108 ; H01Q1/24
Abstract:
The present disclosure advances the art by providing a method and system for forming electronic devices. In particular, and by example only, methods are described for forming devices for harvesting energy in the terahertz frequency range on flexible substrates, wherein the methods provide favorable accuracy in registration of the various device elements and facilitate low-cost R2R manufacturing.
Public/Granted literature
- US20180025903A1 TOOLS & METHODS FOR PRODUCING NANOANTENNA ELECTRONIC DEVICES Public/Granted day:2018-01-25
Information query
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