Invention Grant
- Patent Title: Substrate processing apparatus and nozzle
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Application No.: US15657356Application Date: 2017-07-24
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Publication No.: US10580669B2Publication Date: 2020-03-03
- Inventor: Tsuyoshi Fukushima , Kazuhiro Aiura , Norihiro Ito
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2016-145942 20160726
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
After a discharge of a processing liquid is stopped, a position of a liquid surface within a nozzle can be observed. A substrate processing apparatus includes a substrate holding mechanism and the nozzle. The substrate holding mechanism is configured to hold a substrate. The nozzle is configured to supply the processing liquid to the substrate. The nozzle includes a pipe member and an observation window. The pipe member has a horizontal part and a downward part extended downwards from the horizontal part, and is configured to discharge the processing liquid from a tip end of the downward part. The observation window is provided at the horizontal part of the pipe member.
Public/Granted literature
- US20180033656A1 SUBSTRATE PROCESSING APPARATUS AND NOZZLE Public/Granted day:2018-02-01
Information query
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