Invention Grant
- Patent Title: Self-aligned single diffusion break for fully depleted silicon-on-insulator and method for producing the same
-
Application No.: US15950907Application Date: 2018-04-11
-
Publication No.: US10580684B2Publication Date: 2020-03-03
- Inventor: Jin Wallner , Katherina Babich , Sunil Kumar Singh
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner P.C.
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L29/06 ; H01L29/66

Abstract:
A method of forming an SDB that is self-aligned to a dummy gate and the resulting device are provided. Embodiments include providing a plurality of gates over a SOI layer above a BOX layer, each gate having a pair of sidewall spacers and a cap layer, and a raised S/D epitaxial regions over the SOI layer between each gate; removing a gate of the plurality of gates and a portion of the SOI layer exposed by the removing of the gate, and a portion of the BOX layer underneath the SOI layer, the removing forms a trench; forming a liner of a first dielectric material over and along sidewalls of the trench; and filling the trench with a second dielectric material.
Public/Granted literature
Information query
IPC分类: