Invention Grant
- Patent Title: Vertical transistors with different gate lengths
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Application No.: US15812843Application Date: 2017-11-14
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Publication No.: US10580770B2Publication Date: 2020-03-03
- Inventor: Xin Miao , Chen Zhang , Kangguo Cheng , Juntao Li
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Vazken Alexanian
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234 ; H01L23/522 ; H01L29/78 ; H01L29/417 ; H01L29/423

Abstract:
Techniques for forming VFETs with differing gate lengths are provided. In one aspect, a method for forming a VFET device includes: patterning fins in a substrate, wherein at least one of the fins includes a vertical fin channel of a FET1 and at least another one of the fins includes a vertical fin channel of a FET2; forming a bottom source and drain; forming bottom spacers on the bottom source and drain; forming gates surrounding the vertical fin channel of the FET1 and FET2; forming top spacers on the gate; and forming top source and drains at the tops of the fins by varying a positioning of the top source and drains relative to at least one of the vertical fin channel of the FET1 and the FET2 such that the FET1/FET2 have an effective gate length Lgate1/Lgate2, wherein Lgate1>Lgate2. A VFET device is also provided.
Public/Granted literature
- US20190148372A1 Vertical Transistors with Different Gate Lengths Public/Granted day:2019-05-16
Information query
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