Invention Grant
- Patent Title: Dynamic random access memory structure and method for preparing the same
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Application No.: US16038709Application Date: 2018-07-18
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Publication No.: US10580778B2Publication Date: 2020-03-03
- Inventor: Da-Zen Chuang , Chih-Chung Sun
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L27/108
- IPC: H01L27/108 ; G11C13/02 ; G11C11/401 ; B82Y40/00 ; B82Y30/00

Abstract:
The present disclosure provides a DRAM cell structure. The DRAM cell structure includes a substrate, a gate structure disposed in the substrate, a source region and a drain region disposed in the substrate respectively at two sides of the gate structure, a landing pad disposed over the drain region, a plurality of carbon nanotubes disposed on the landing pad, a top electrode disposed over the plurality of carbon nanotubes, and a dielectric layer disposed between the top electrode and the plurality of carbon nanotubes.
Public/Granted literature
- US20200027884A1 DYNAMIC RANDOM ACCESS MEMORY STRUCTURE AND METHOD FOR PREPARING THE SAME Public/Granted day:2020-01-23
Information query
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