Invention Grant
- Patent Title: Methods for forming three-dimensional memory devices
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Application No.: US16137638Application Date: 2018-09-21
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Publication No.: US10580788B2Publication Date: 2020-03-03
- Inventor: Jifeng Zhu , Jun Chen , Zhenyu Lu , Qian Tao , Si Ping Hu , Jia Wen Wang , Yang Fu
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: Yangtze Memory Technologies, Co., Ltd.
- Current Assignee: Yangtze Memory Technologies, Co., Ltd.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L27/11582 ; H01L27/11573

Abstract:
Embodiments of methods for forming three-dimensional (3D) memory devices are disclosed. In an example, a peripheral device is formed on a first substrate. A first interconnect layer is formed above the peripheral device on the first substrate. A dielectric stack including a plurality of dielectric/sacrificial layer pairs and a plurality of memory strings each extending vertically through the dielectric stack is formed on a second substrate. A second interconnect layer is formed above the memory strings on the second substrate. The first substrate and the second substrate are bonded, so that the first interconnect layer is below and in contact with the second interconnect layer. The second substrate is thinned after the bonding. A memory stack is formed below the thinned second substrate and including a plurality of conductor/dielectric layer pairs by replacing, with a plurality of conductor layers, sacrificial layers in the dielectric/sacrificial layer pairs.
Public/Granted literature
- US20200027892A1 METHODS FOR FORMING THREE-DIMENSIONAL MEMORY DEVICES Public/Granted day:2020-01-23
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