Imaging panel and method for producing same
Abstract:
Provided is an X-ray imaging panel and a method for producing the same with improved productivity. An imaging panel 1 has an active area and a terminal area on a substrate 101. In the terminal area, there are provided: a first conductive layer 100; a terminal first insulating film 103 that is formed with the same material as that of a first insulating film in the active area, and has a first opening; a second conductive layer 1701 that is formed with the same material as that of a conductive film in the active area, and overlaps with the first conductive layer 100 at a position where the first opening is provided; and a cover layer provided at the position where the first opening is provided, so as to be arranged between the first conductive layer 100 and the second conductive layer 1701. The first conductive layer 100 is formed with the same material as that of any one of a gate electrode and a source electrode of a thin film transistor as well as a lower electrode in the active area. The cover layer is formed with the same material as that of at least one element arranged in an upper layer with respect to one element made of the same material as that of the first conductive layer 100 among the source electrode, the lower electrode, and a bias line in the active area.
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