Embodiments are directed to a method of forming a stacked nanosheet and resulting structures having equal thickness work function metal layers. A nanosheet stack is formed on a substrate. The nanosheet stack includes a first sacrificial layer formed on a first nanosheet. A hard mask is formed on the first sacrificial layer and the first sacrificial layer is removed to form a cavity between the hard mask and the first nanosheet. A work function layer is formed to fill the cavity between the hard mask and the first nanosheet.