Invention Grant
- Patent Title: Stacked body including graphene film and electronic device including graphene film
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Application No.: US15491690Application Date: 2017-04-19
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Publication No.: US10580869B2Publication Date: 2020-03-03
- Inventor: Masaya Okada , Fuminori Mitsuhashi , Yasunori Tateno , Masaki Ueno , Maki Suemitsu , Hirokazu Fukidome
- Applicant: Sumitomo Electric Industries, Ltd. , TOHOKU UNIVERSITY
- Applicant Address: JP Osaka-shi JP Sendai-shi
- Assignee: Sumitomo Electric Industries, Ltd.,Tohoku University
- Current Assignee: Sumitomo Electric Industries, Ltd.,Tohoku University
- Current Assignee Address: JP Osaka-shi JP Sendai-shi
- Agency: Baker Botts L.L.P.
- Agent Michael A. Sartori
- Priority: JP2016-083868 20160419; JP2016-234207 20161201; JP2016-234444 20161201
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/08 ; H01L29/12 ; H01L29/16 ; H01L21/02 ; H01L29/04 ; H01L29/66

Abstract:
A stacked body includes: a substrate made of silicon carbide and having a first main surface forming an angle of 20° or less with a silicon plane; and a graphene film disposed on the first main surface and having an atomic arrangement oriented in relation to an atomic arrangement of silicon carbide forming the substrate. In an exposed surface of the graphene film which is a main surface opposite to the substrate, an area ratio of a region having a full width at half maximum of G′ of 40 cm−1 or less under Raman spectroscopy analysis is 50% or more. Accordingly, the stacked body is provided that enables a high mobility to be stably ensured in an electronic device manufactured to include the graphene film forming an electrically conductive portion.
Public/Granted literature
- US20170301758A1 STACKED BODY AND ELECTRONIC DEVICE Public/Granted day:2017-10-19
Information query
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