- Patent Title: Method for producing a stack of layers for a matrix thermal sensor
-
Application No.: US16186926Application Date: 2018-11-12
-
Publication No.: US10580956B2Publication Date: 2020-03-03
- Inventor: Amelie Revaux , Joel Yann Fourre , Jean-Francois Mainguet
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES , IDEMIA IDENTITY & SECURITY FRANCE
- Applicant Address: FR Paris FR Issy les Moulineaux
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,IDEMIA IDENTITY & SECURITY FRANCE
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,IDEMIA IDENTITY & SECURITY FRANCE
- Current Assignee Address: FR Paris FR Issy les Moulineaux
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1760652 20171113
- Main IPC: H01L37/02
- IPC: H01L37/02 ; G01J5/34 ; B32B7/12 ; B32B9/04 ; G06K9/00

Abstract:
A method produces a matrix of pixels of a thermal sensor, suitable for passive addressing. The matrix of pixels includes a layer including a first series of electrically conducting strips, forming charge collection macro-electrodes; a layer including a pyroelectric material; and a layer including a second series of electrically conducting strips, forming heating strips. The method includes a step of transfer of one on the other of a first and a second elementary stack, the first elementary stack including the first series of strips, and the second elementary stack including the second series of strips. This method makes it possible to relax the manufacturing constraints of the series of strips.
Public/Granted literature
- US20190148618A1 METHOD FOR PRODUCING A STACK OF LAYERS FOR A MATRIX THERMAL SENSOR Public/Granted day:2019-05-16
Information query
IPC分类: