Invention Grant
- Patent Title: Piezoelectric driving device, motor, robot, and pump
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Application No.: US15417415Application Date: 2017-01-27
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Publication No.: US10580960B2Publication Date: 2020-03-03
- Inventor: Tomokazu Kobayashi , Daisuke Yamada
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2016-015772 20160129
- Main IPC: H01L41/09
- IPC: H01L41/09 ; B25J17/00 ; F04B43/09 ; H01L41/047

Abstract:
A piezoelectric driving device includes a vibrating plate, a first electrode, a piezoelectric layer, a second electrode layer provided above the vibrating plate. An active section is formed in a portion where the first electrode layer, the piezoelectric layer, and the second electrode layer overlap one another. The active section has a longitudinal direction and a latitudinal direction in plan view. At both ends in the latitudinal direction, ends of the first electrode layer are disposed in the same positions as ends of the wiring layer or further on the outer side than the ends, ends of the second electrode layer are disposed in the same positions as the ends of the wiring layer or further on the inner side than the ends, and the ends of the first electrode layer are disposed further on the outer side than the ends of the second electrode layer.
Public/Granted literature
- US20170222124A1 PIEZOELECTRIC DRIVING DEVICE, MOTOR, ROBOT, AND PUMP Public/Granted day:2017-08-03
Information query
IPC分类: