Piezoelectric driving device, motor, robot, and pump
Abstract:
A piezoelectric driving device includes a vibrating plate, a first electrode, a piezoelectric layer, a second electrode layer provided above the vibrating plate. An active section is formed in a portion where the first electrode layer, the piezoelectric layer, and the second electrode layer overlap one another. The active section has a longitudinal direction and a latitudinal direction in plan view. At both ends in the latitudinal direction, ends of the first electrode layer are disposed in the same positions as ends of the wiring layer or further on the outer side than the ends, ends of the second electrode layer are disposed in the same positions as the ends of the wiring layer or further on the inner side than the ends, and the ends of the first electrode layer are disposed further on the outer side than the ends of the second electrode layer.
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