Invention Grant
- Patent Title: Method, system, and device for phase change memory switch wall cell with approximately horizontal electrode contact cross references
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Application No.: US16216161Application Date: 2018-12-11
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Publication No.: US10580980B2Publication Date: 2020-03-03
- Inventor: Fabio Pellizzer , Innocenzo Tortorelli
- Applicant: Ovonyx Memory Technology, LLC
- Applicant Address: US VA Alexandria
- Assignee: OVONYX MEMORY TECHNOLOGY, LLC
- Current Assignee: OVONYX MEMORY TECHNOLOGY, LLC
- Current Assignee Address: US VA Alexandria
- Agency: Holland & Hart LLP
- Main IPC: G11C11/00
- IPC: G11C11/00 ; H01L45/00 ; G11C13/00 ; H01L27/24

Abstract:
Embodiments disclosed herein may include depositing a storage component material over and/or in a trench in a dielectric material, including depositing the storage component material on approximately vertical walls of the trench and a bottom of the trench. Embodiments may also include etching the storage component material so that at least a portion of the storage component material remains on the approximately vertical walls and the bottom of the trench, wherein the trench is contacting an electrode and a selector such that storage component material on the bottom of the trench contacts the electrode.
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