Invention Grant
- Patent Title: Integrated quartz MEMS tuning fork resonator/oscillator
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Application No.: US16102469Application Date: 2018-08-13
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Publication No.: US10581402B1Publication Date: 2020-03-03
- Inventor: Randall L. Kubena
- Applicant: HRL LABORATORIES LLC.
- Applicant Address: US CA Malibu
- Assignee: HRL Laboratories, LLC
- Current Assignee: HRL Laboratories, LLC
- Current Assignee Address: US CA Malibu
- Agency: Ladas & Parry
- Main IPC: H03H9/215
- IPC: H03H9/215 ; H03H9/05 ; H03H9/13 ; H01L41/047 ; H01L41/053 ; H03H3/02 ; H03H9/125

Abstract:
A piezoelectric quartz tuning fork resonator having a pair of tines formed from a common quartz plate, with a middle electrode and two outer electrodes being disposed at or on top and bottom surfaces of each of the pair of tines and interconnected such that the outer electrodes at or on the top and bottom surfaces of a first one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of a second one of the pair of tines and further interconnected such that the outer electrodes at or on the top and bottom surfaces of the second one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of the first one of the pair of tines.
Information query
IPC分类: