Invention Grant
- Patent Title: Sample height measurement using digital grating
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Application No.: US15972756Application Date: 2018-05-07
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Publication No.: US10582099B2Publication Date: 2020-03-03
- Inventor: Shiguang Li , Jie Guo
- Applicant: Zhongke Jingyuan Electron Limited
- Applicant Address: CN Beijing
- Assignee: Zhongke Jingyuan Electron Limited
- Current Assignee: Zhongke Jingyuan Electron Limited
- Current Assignee Address: CN Beijing
- Agency: Young Basile Hanlon & MacFarlane, P.C.
- Priority: CN201810343087 20180417
- Main IPC: H04N7/18
- IPC: H04N7/18 ; H04N5/225 ; G06T7/521 ; H04N5/232 ; H04N5/372 ; H04N5/374

Abstract:
A method, an apparatus, and a non-transitory computer-readable medium for measuring a height of a sample includes: receiving, by an optical sensor having pixels, an optical grating image of an illuminated optical grating reflected by a surface of the sample; determining, by a processor, a digital grating image by keeping values of first pixels of the optical grating image and resetting values of second pixels of the optical grating image; and determining the height based on a relationship between an integrated intensity of a portion of the digital grating image and the height.
Public/Granted literature
- US20190320097A1 Sample Height Measurement Using Digital Grating Public/Granted day:2019-10-17
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