Invention Grant
- Patent Title: Capacitive MEMS device, capacitive MEMS sound transducer, method for forming a capacitive MEMS device, and method for operating a capacitive MEMS device
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Application No.: US15446643Application Date: 2017-03-01
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Publication No.: US10582306B2Publication Date: 2020-03-03
- Inventor: Alfons Dehe
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R19/02 ; H04R19/00 ; H04R7/04

Abstract:
A capacitive MEMS device, a capacitive MEMS sound transducer, a method for forming a capacitive MEMS device and a method for operating a capacitive MEMS device are disclosed. In an embodiment the capacitive MEMS device includes a first electrode structure comprising a first conductive layer and a second electrode structure comprising a second conductive layer, wherein the second conductive layer at least partially opposes the first conductive layer, and wherein the second conductive layer includes a multiple segmentation which provides an electrical isolation between at least three portions of the second conductive layer.
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