Invention Grant
- Patent Title: High sensitivity microphone and manufacturing method thereof
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Application No.: US16371645Application Date: 2019-04-01
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Publication No.: US10582308B2Publication Date: 2020-03-03
- Inventor: Ilseon Yoo
- Applicant: HYUNDAI MOTOR COMPANY , KIA MOTORS CORPORATION
- Applicant Address: KR Seoul KR Seoul
- Assignee: HYUNDAI MOTOR COMPANY,KIA MOTORS CORPORATION
- Current Assignee: HYUNDAI MOTOR COMPANY,KIA MOTORS CORPORATION
- Current Assignee Address: KR Seoul KR Seoul
- Agency: Morgan, Lewis & Bockius LLP
- Priority: KR10-2016-0116721 20160909
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H01L51/00 ; H04R19/00 ; H04R31/00 ; B81B3/00 ; B81C1/00

Abstract:
A high sensitivity microphone includes a substrate having a through portion provided in a central portion thereof, a vibration membrane disposed on the substrate and covering the through portion, a fixed membrane installed above the vibration membrane, spaced apart from the vibration membrane with an air layer interposed therebetween, and having a plurality of air inlets perforated in a direction toward the air layer, and a plurality of support posts provided as vertical elastic posts between the fixed membrane and the vibration membrane and mechanically fixing the vibration membrane by a frictional force, regardless of an applied voltage.
Public/Granted literature
- US20190230447A1 HIGH SENSITIVITY MICROPHONE AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-07-25
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