Invention Grant
- Patent Title: Sensor system for multi-zone electrostatic chuck
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Application No.: US15409362Application Date: 2017-01-18
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Publication No.: US10582570B2Publication Date: 2020-03-03
- Inventor: Vijay D. Parkhe
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H05B1/02
- IPC: H05B1/02 ; H01L21/67 ; H01L21/324 ; H01L21/683 ; G03F7/20 ; H05B3/06
Abstract:
A heater assembly for a substrate support assembly includes a body. The heater assembly further includes one or more main resistive heating elements disposed in the body and a plurality of additional resistive heating elements disposed in the body. The heater assembly further includes a plurality of temperature sensors disposed in the body, wherein one or more of the plurality of temperature sensors is disposed proximate to one of the plurality of additional resistive heating elements.
Public/Granted literature
- US20170215230A1 SENSOR SYSTEM FOR MULTI-ZONE ELECTROSTATIC CHUCK Public/Granted day:2017-07-27
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