Invention Grant
- Patent Title: MEMS pressure sensor and method for positioning MEMS pressure sensor using two film sheets
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Application No.: US15557280Application Date: 2015-12-11
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Publication No.: US10582859B2Publication Date: 2020-03-10
- Inventor: Shinichi Takahashi
- Applicant: ACT MEDICAL SERVICE CO., LTD.
- Applicant Address: JP Fukushima
- Assignee: ACT MEDICAL SERVICE CO., LTD.
- Current Assignee: ACT MEDICAL SERVICE CO., LTD.
- Current Assignee Address: JP Fukushima
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2015-050920 20150313
- International Application: PCT/JP2015/084799 WO 20151211
- International Announcement: WO2016/147503 WO 20160922
- Main IPC: A61B5/021
- IPC: A61B5/021 ; A61B5/024 ; G01L19/00 ; A61B5/022 ; A61B5/02 ; A61B5/00

Abstract:
An MEMS pressure sensing apparatus includes an MEMS pressure sensor, and first and second film sheets. The MEMS pressure sensor has a first space on a side of a pressure detection surface of a diaphragm, and has the diaphragm. The first film sheet is placed on and in contact with a part under measurement so as to support the MEMS pressure sensor, and has a second space communicating with the first space and having a size in a direction parallel to the pressure detection surface. The second film sheet has a third space with a size in a direction parallel to the pressure detection surface for positioning the MEMS pressure sensing apparatus on the part under measurement, and is placed such that an area of the part under measurement is located in the third space before the MEMS pressure sensing apparatus is placed on the part under measurement.
Public/Granted literature
- US20180055387A1 MEMS PRESSURE SENSOR AND METHOD FOR POSITIONING MEMS PRESSURE SENSOR USING TWO FILM SHEETS Public/Granted day:2018-03-01
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