A method and apparatus for producing titanium metal powder from a melt. The apparatus includes an atomization chamber having an inner wall that is coated with or formed entirely of a titanium alloy that is the same as the titanium metal powder to prevent contamination of titanium metal powder therein. The inner surfaces of some or all components of the apparatus in a flow path following the atomization chamber may also be coated with or formed entirely of the titanium alloy or CP-Ti.