Invention Grant
- Patent Title: Lithography apparatus, control method therefor, and method of manufacturing article
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Application No.: US15013458Application Date: 2016-02-02
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Publication No.: US10583608B2Publication Date: 2020-03-10
- Inventor: Shinichi Hirano
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2015-023543 20150209; JP2016-003695 20160112
- Main IPC: B29C64/386
- IPC: B29C64/386 ; G03F7/00 ; B29C64/20 ; G03F7/20 ; G03F9/00 ; B29C64/393

Abstract:
A lithography apparatus is provided. The lithography apparatus includes a control unit that obtains information of an expected processing count to be processed in a lot by a transfer unit, obtains information of an accumulated processing count, in the transfer unit, of each of originals in a original storage unit, and preferentially selects, from the originals, an original whose process enable count before the accumulated processing count reaches a predetermined count is not smaller than the expected processing count.
Public/Granted literature
- US20160231648A1 LITHOGRAPHY APPARATUS, CONTROL METHOD THEREFOR, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2016-08-11
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