Invention Grant
- Patent Title: Container storage facility
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Application No.: US15474364Application Date: 2017-03-30
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Publication No.: US10583983B2Publication Date: 2020-03-10
- Inventor: Shinsuke Kawamura , Tadahiro Yoshimoto
- Applicant: Daifuku Co., Ltd.
- Applicant Address: JP Osaka-shi
- Assignee: Daifuku Co., Ltd.
- Current Assignee: Daifuku Co., Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: The Webb Law Firm
- Priority: JP2016-070793 20160331; JP2016-139587 20160714
- Main IPC: H01L21/673
- IPC: H01L21/673 ; B65G1/04 ; H01L21/677

Abstract:
A gas supplying device has a plurality of connectors each of which is configured to be connected to a container stored in the corresponding one of supplying storage sections, supply lines configured to divide and supply gas to the plurality of connectors, and a mass flow controller configured to control a flow rate of gas that flows through one of the supply lines. The supply lines include first supply lines each of which is installed to a corresponding supplying storage sections, a second supply line installed upstream of the first supply lines, and a branching supply line for dividing gas supplied from the second supply line into the first supply lines. The mass flow controller is installed in the second supply line and in an installation area.
Public/Granted literature
- US20170283170A1 Container Storage Facility Public/Granted day:2017-10-05
Information query
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