Invention Grant
- Patent Title: Titanium-containing film forming compositions for vapor deposition of titanium-containing films
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Application No.: US15827783Application Date: 2017-11-30
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Publication No.: US10584039B2Publication Date: 2020-03-10
- Inventor: Antonio Sanchez , Jean-Marc Girard , Grigory Nikiforov , Nicolas Blasco
- Applicant: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Applicant Address: FR Paris
- Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Current Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Current Assignee Address: FR Paris
- Agent Allen E. White; Patricia E. McQueeney
- Main IPC: C23C16/08
- IPC: C23C16/08 ; C23C16/30 ; C01G23/02 ; C23C16/40 ; C23C16/34 ; H01L21/768 ; H01L21/02 ; C23C16/448 ; C23C16/455 ; C07F11/00 ; G01N25/48 ; G01R33/46 ; C01B7/13
Abstract:
Titanium-containing film forming compositions comprising titanium halide-containing precursors are disclosed. Also disclosed are methods of synthesizing and using the disclosed precursors to deposit Titanium-containing films on one or more substrates via vapor deposition processes.
Public/Granted literature
- US20190161358A1 TITANIUM-CONTAINING FILM FORMING COMPOSITIONS FOR VAPOR DEPOSITION OF TITANIUM-CONTAINING FILMS Public/Granted day:2019-05-30
Information query
IPC分类:
