Invention Grant
- Patent Title: Rotary feed-through for mounting a rotating substrate tube in a lathe, a CVD lathe and a corresponding method using the CVD lathe
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Application No.: US15560247Application Date: 2016-03-22
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Publication No.: US10584055B2Publication Date: 2020-03-10
- Inventor: Igor Milicevic , Raoul Hens , Johannes Antoon Hartsuiker , Gertjan Krabshuis , Mattheus Jacobus Nicolaas van Stralen
- Applicant: Draka Comteq B.V.
- Applicant Address: NL Amsterdam
- Assignee: Draka Comteq B.V.
- Current Assignee: Draka Comteq B.V.
- Current Assignee Address: NL Amsterdam
- Agency: Shumaker, Loop & Kendrick, LLP
- Priority: NL2014519 20150325
- International Application: PCT/NL2016/050198 WO 20160322
- International Announcement: WO2016/153346 WO 20160929
- Main IPC: C03B37/018
- IPC: C03B37/018

Abstract:
A rotary feed-through for mounting a rotating substrate tube in a lathe and providing a flow of process gas into the tube, said feed-through including a process gas supply line for providing a process gas into said substrate tube, a rotatable holder arranged for receiving and holding said substrate tube for rotating said substrate tube with respect to said process gas supply line, a rotary union provided between said rotatable holder and said process gas supply line for rotatably connecting said rotatable holder to said process gas supply line, a stationary housing connected to said process gas supply line and to said rotatable holder, therewith forming a closed cavity surrounding said rotary union, wherein said stationary housing further includes an auxiliary gas supply line for providing said closed cavity with an auxiliary gas.
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