Invention Grant
- Patent Title: Superhydrophobic electrode and biosensing device using the same
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Application No.: US16219208Application Date: 2018-12-13
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Publication No.: US10585063B2Publication Date: 2020-03-10
- Inventor: Ali Afzali-Ardakani , Karthik Balakrishnan , Stephen W. Bedell , Pouya Hashemi , Bahman Hekmatshoartabari , Alexander Reznicek
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Erik Johnson
- Main IPC: H01L29/417
- IPC: H01L29/417 ; G01N27/414 ; G01N27/30 ; H01L29/06 ; H01L29/20 ; H01L29/16 ; G01N27/327
Abstract:
A method for making a hydrophobic biosensing device includes forming alternating layers over a top and sides of a fin on a dielectric layer to form a stack of layers. The stack of layers are planarized to expose the top of the fin. The fin and every other layer are removed to form a cathode group of fins and an anode group of fins. A hydrophobic surface on the two groups of fins.
Public/Granted literature
- US20190128841A1 SUPERHYDROPHOBIC ELECTRODE AND BIOSENSING DEVICE USING THE SAME Public/Granted day:2019-05-02
Information query
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