Invention Grant
- Patent Title: Scanning probe system
-
Application No.: US16513175Application Date: 2019-07-16
-
Publication No.: US10585114B2Publication Date: 2020-03-10
- Inventor: Andrew Humphris
- Applicant: INFINITESIMA LIMITED
- Applicant Address: GB Abingdon
- Assignee: INFINITESIMA LIMITED
- Current Assignee: INFINITESIMA LIMITED
- Current Assignee Address: GB Abingdon
- Agency: Marshall, Gerstein & Borun LLP
- Priority: EP15171911 20150612
- Main IPC: G01Q10/06
- IPC: G01Q10/06 ; G01Q20/02

Abstract:
A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip.
Public/Granted literature
- US20200011893A1 SCANNING PROBE SYSTEM Public/Granted day:2020-01-09
Information query