Invention Grant
- Patent Title: Integrated self-coining probe
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Application No.: US15969468Application Date: 2018-05-02
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Publication No.: US10585119B2Publication Date: 2020-03-10
- Inventor: Yang Liu , Steven L. Wright
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent JoAnn Kealy Crockatt
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R31/28 ; G01R31/04

Abstract:
A probe head that contains a coining surface and a plurality of probe tips integrated on a same side of the probe head is provided. The probe head has a first portion and a laterally adjacent second portion, wherein the first portion of the probe head contains the coining surface, and the second portion of the probe head contains the plurality of the probe tips. Each probe tip may, in some embodiments, extend outwards from a probe pedestal that is in contact with the second portion of the probe head. The probe head is traversed across the surface of a semiconductor wafer containing a plurality of solder bump arrays such that the coining surface contacts a specific array of solder bumps prior to contacting of the same specific array of solder bumps with the probe tips.
Public/Granted literature
- US20180252747A1 INTEGRATED SELF-COINING PROBE Public/Granted day:2018-09-06
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