An apparatus reduces optical damage on an optical element that interacts with a light beam. The apparatus includes: an optical system configured to interact with a light beam to perform a modification to one or more aspects of the light beam, an alignment system, and an actuator. The optical system comprises at least one optical element having a surface configured to interact with the light beam, the surface being continuous and non-diffuse. The alignment system is configured to align the light beam relative to the optical element surface so that the light beam interacts with the optical element while the light beam is traveling at a first beam direction relative to the surface of the optical element and the light beam is outputted from the optical element along a second beam direction relative to the surface of the optical element after the light beam and optical element have interacted.