Invention Grant
- Patent Title: Method and device for examination of a sample
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Application No.: US15565428Application Date: 2016-04-13
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Publication No.: US10585271B2Publication Date: 2020-03-10
- Inventor: Florian Fahrbach , Werner Knebel
- Applicant: Leica Microsystems CMS GmbH
- Applicant Address: DE Wetzlar
- Assignee: LEICA MICROSYSTEMS CMS GMBH
- Current Assignee: LEICA MICROSYSTEMS CMS GMBH
- Current Assignee Address: DE Wetzlar
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE102015105624 20150413
- International Application: PCT/EP2016/058107 WO 20160413
- International Announcement: WO2016/166151 WO 20161020
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G02B21/06 ; G02B21/16 ; G02B21/36

Abstract:
A method for examining a sample includes illuminating the sample in an illumination plane along an illumination strip by an illuminating light beam which propagates along the illumination strip. The illumination strip is projected into a detection plane by detection light originating from the illumination strip being focused in the detection plane. The detection light is detected by a detector. The detector is formed as a slit detector, and the direction of a slit width of the slit detector is oriented at an angle different from zero degrees with respect to the direction of a longitudinal extent of an image of the illumination strip projected into the detection plane.
Public/Granted literature
- US20180120548A1 METHOD AND DEVICE FOR EXAMINATION OF A SAMPLE Public/Granted day:2018-05-03
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