Invention Grant
- Patent Title: Pellicle, pellicle production method and exposure method using pellicle
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Application No.: US15454631Application Date: 2017-03-09
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Publication No.: US10585348B2Publication Date: 2020-03-10
- Inventor: Kazuo Kohmura , Daiki Taneichi , Takashi Kozeki , Yosuke Ono , Hisako Ishikawa , Tsuneaki Biyajima , Atsushi Okubo , Yasuyuki Sato , Toshiaki Hirota
- Applicant: MITSUI CHEMICALS, INC.
- Applicant Address: JP Minato-Ku, Tokyo
- Assignee: MITSUI CHEMICALS, INC.
- Current Assignee: MITSUI CHEMICALS, INC.
- Current Assignee Address: JP Minato-Ku, Tokyo
- Agency: Buchanan, Ingersoll & Rooney PC
- Priority: JP2014-192007 20140919
- Main IPC: G03F1/62
- IPC: G03F1/62 ; G03F1/64 ; G03F7/20 ; G03F1/00

Abstract:
Provided are a pellicle for extreme ultraviolet light lithography, a method for producing the same, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame supporting the first frame; a through-hole running through the first frame; and a filter covering the through-hole on the side of a surface of the first frame on which the pellicle film is located. The through-hole may run through the pellicle film; and the filter may be located on the pellicle film. The filter may be located, adjacent to the pellicle film, on the first frame.
Public/Granted literature
- US20170184957A1 PELLICLE, PELLICLE PRODUCTION METHOD AND EXPOSURE METHOD USING PELLICLE Public/Granted day:2017-06-29
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