Invention Grant
- Patent Title: Uniform CMP polishing method
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Application No.: US15725836Application Date: 2017-10-05
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Publication No.: US10586708B2Publication Date: 2020-03-10
- Inventor: John Vu Nguyen , Tony Quan Tran , Jeffrey James Hendron , Jeffrey Robert Stack
- Applicant: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Applicant Address: US DE Newark
- Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee Address: US DE Newark
- Agent Blake T. Biederman
- Main IPC: B24B37/26
- IPC: B24B37/26 ; H01L21/304 ; B24B57/02 ; C09G1/02 ; C09K3/14 ; H01L21/02 ; H01L21/3105 ; H01L21/321 ; H01L21/67

Abstract:
The invention provides a method for polishing or planarizing a wafer of at least one of semiconductor, optical and magnetic substrates. The method includes rotating a polishing pad having radial feeder grooves in a polishing layer separating the polishing layer into polishing regions. The radial feeder grooves extend at least from a location adjacent the center to a location adjacent the outer edge. Each polishing region includes a series of biased grooves connecting a pair of adjacent radial feeder grooves. The series of biased grooves separate a land area and have inner walls closer to the center and outer walls closer to the outer edge. Pressing and rotating the wafer against the rotating polishing pad for multiple rotations polishes or planarizes the wafer with land areas wet by the overflowing polishing fluid.
Public/Granted literature
- US20180366331A1 UNIFORM CMP POLISHING METHOD Public/Granted day:2018-12-20
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