Invention Grant
- Patent Title: Method of manufacturing an electronic component and processing system
-
Application No.: US15755396Application Date: 2016-08-17
-
Publication No.: US10586712B2Publication Date: 2020-03-10
- Inventor: Takashi Kageyama , Tetsuya Shimada , Koji Takahashi , Yuu Nakamuta , Manabu Harada
- Applicant: ULVAC, INC.
- Applicant Address: JP Chigasaki-Shi, Kanagawa
- Assignee: ULVAC, INC.
- Current Assignee: ULVAC, INC.
- Current Assignee Address: JP Chigasaki-Shi, Kanagawa
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: JP2015-166389 20150826
- International Application: PCT/JP2016/073973 WO 20160817
- International Announcement: WO2017/033808 WO 20170302
- Main IPC: H01L21/32
- IPC: H01L21/32 ; H01L23/29 ; H01L23/31 ; H01L21/56 ; H01L21/673 ; H01L21/02 ; H01L23/00

Abstract:
According to a mode of the present invention, a method of manufacturing an electronic component includes: preparing a component main-body 110 including a first surface having an electrode-formed region having a plurality of bump electrodes 103, a second surface opposite to the first surface, and side peripheral surfaces connecting the first surface and the second surface; forming a mask section M1 on at least a peripheral portion of the first surface, the mask section surrounding the electrode-formed region, a height of the mask section being equal to or more than a height of the plurality of bump electrodes; bonding the mask section of the first surface to an adhesive layer 30 on a holder for holding a component; forming a protective film 105 on the component main-body, the protective film covering the second surface and the side peripheral surfaces; and removing the mask section M1 from the first surface.
Public/Granted literature
- US20180254192A1 METHOD OF MANUFACTURING AN ELECTRONIC COMPONENT AND PROCESSING SYSTEM Public/Granted day:2018-09-06
Information query
IPC分类: