Invention Grant
- Patent Title: Cooling base with spiral channels for ESC
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Application No.: US15335059Application Date: 2016-10-26
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Publication No.: US10586718B2Publication Date: 2020-03-10
- Inventor: Vladimir Knyazik , Shahid Rauf , Stephen Prouty , Roland Smith , Denis M. Koosau
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; F28F3/12 ; F28D7/04 ; F28D1/047
Abstract:
Implementations described herein provide a cooling base and a substrate support assembly having the same. In one example, a cooling base is provided that includes a body coupled to a cap. A plurality cooling channels are disposed in the body and bounded on at least one side by the cap. The plurality cooling channels have a polar array of spirals.
Public/Granted literature
- US20170133244A1 COOLING BASE WITH SPIRAL CHANNELS FOR ESC Public/Granted day:2017-05-11
Information query
IPC分类:
