Invention Grant
- Patent Title: Method for direct bonding of III-V semiconductor substrates with a radical oxide layer
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Application No.: US15340377Application Date: 2016-11-01
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Publication No.: US10586783B2Publication Date: 2020-03-10
- Inventor: Hubert Moriceau , Bruno Imbert , Xavier Blot
- Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives , SOITEC
- Applicant Address: FR Paris FR Bernin
- Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives,SOITEC
- Current Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives,SOITEC
- Current Assignee Address: FR Paris FR Bernin
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1560722 20151109
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/762 ; H01L21/18 ; H01L21/20 ; H01L33/00

Abstract:
A manufacturing method including supplying a first substrate including a first face designated front face, the front face being made of a III-V type semiconductor, supplying a second substrate, forming a radical oxide layer on the front face of the first substrate by executing a radical oxidation, assembling, by a step of direct bonding, the first substrate and the second substrate so as to form an assembly including the radical oxide layer intercalated between the first and second substrates, executing a heat treatment intended to reinforce the assembly interface, and making disappear, at least partially, the radical oxide layer.
Public/Granted literature
- US20170133347A1 METHOD FOR MANUFACTURING SUBSTRATES Public/Granted day:2017-05-11
Information query
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