Invention Grant
- Patent Title: Flash memory cells
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Application No.: US15870735Application Date: 2018-01-12
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Publication No.: US10586801B2Publication Date: 2020-03-10
- Inventor: Prakash Rau Mokhna Rau , Wesly McKinsey , Rithu Bhonsle
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Thorpe North & Western, LLP
- Agent David W. Osborne
- Main IPC: H01L27/11524
- IPC: H01L27/11524 ; H01L27/11551 ; H01L27/11556 ; B82Y40/00 ; B82Y10/00

Abstract:
3D NAND memory cells can include a source layer, a dielectric layer disposed on the source layer, and a select gate source (SGS) layer disposed on the dielectric layer. A plurality of alternating layers of conducting material and insulating material can be disposed on the SGS layer. A conductive channel can be formed within a cell pillar trench. The conductive channel can be in contact with the source layer and the plurality of alternating layers. The cell pillar trench can be positioned in a substantially perpendicular orientation with respect to the plurality of alternating layers.
Public/Granted literature
- US20190043871A1 FLASH MEMORY CELLS Public/Granted day:2019-02-07
Information query
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