Invention Grant
- Patent Title: Self-alignment of a pad and ground in an image sensor
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Application No.: US16242924Application Date: 2019-01-08
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Publication No.: US10586825B2Publication Date: 2020-03-10
- Inventor: Qin Wang , Gang Chen , Duli Mao
- Applicant: OmniVision Technologies, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: H01L27/148
- IPC: H01L27/148 ; H01L27/30 ; H01L27/146 ; H01L23/00 ; H01L21/768 ; H01L27/32

Abstract:
An image sensor includes a plurality of photodiodes disposed in a semiconductor material to convert image light into image charge, and a metal grid, including a metal shield that is coplanar with the metal grid, disposed proximate to a backside of the semiconductor material. The metal grid is optically aligned with the plurality of photodiodes to direct the image light into the plurality of photodiodes, and a contact pad is disposed in a trench in the semiconductor material. The contact pad is coupled to the metal shield to ground the metal shield.
Public/Granted literature
- US20190165033A1 SELF-ALIGNMENT OF A PAD AND GROUND IN AN IMAGE SENSOR Public/Granted day:2019-05-30
Information query
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