Invention Grant
- Patent Title: Semiconductor device and fabrication method thereof
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Application No.: US16117804Application Date: 2018-08-30
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Publication No.: US10586859B2Publication Date: 2020-03-10
- Inventor: Qing Peng Wang
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , SMIC New Technology Research and Development (Shanghai) Corporation
- Applicant Address: CN Shanghai CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,SMIC New Technology Research and Development (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,SMIC New Technology Research and Development (Shanghai) Corporation
- Current Assignee Address: CN Shanghai CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201711116553 20171113
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8234 ; H01L21/762 ; H01L21/306 ; H01L21/308 ; H01L21/027 ; H01L21/3105 ; H01L21/02 ; H01L29/06 ; H01L27/088 ; H01L27/02

Abstract:
A semiconductor structure and a method for fabricating the semiconductor structure are provided. The method includes providing a semiconductor substrate including a dense region and a sparse region. The method also includes forming initial fins equally spaced apart from one another on the semiconductor substrate, the initial fins including a plurality of intrinsic fins and dummy fins. The intrinsic fins on the dense region has a spatial density greater than the intrinsic fins on the sparse region. In addition, the method includes forming a first isolation layer on the semiconductor substrate. The first isolation layer covers a portion of sidewalls of the dummy fins and a portion of sidewalls of the intrinsic fins. Further, the method includes forming first trenches in the first isolation layer by removing the dummy fins, and forming a second isolation layer in the first trenches.
Public/Granted literature
- US20190148235A1 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2019-05-16
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