Invention Grant
- Patent Title: Low-cost semiconductor device manufacturing method
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Application No.: US15600842Application Date: 2017-05-22
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Publication No.: US10586863B2Publication Date: 2020-03-10
- Inventor: Francois Hebert , Yon Sup Pang , Yu Shin Ryu , Seong Min Cho , Ju Ho Kim
- Applicant: Magnachip Semiconductor, Ltd.
- Applicant Address: KR Cheongju-si
- Assignee: MagnaChip Semiconductor, Ltd.
- Current Assignee: MagnaChip Semiconductor, Ltd.
- Current Assignee Address: KR Cheongju-si
- Agency: NSIP Law
- Priority: KR10-2014-0026362 20140306
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L21/8238 ; H01L27/092 ; H01L21/761 ; H01L29/872 ; H01L29/10 ; H01L21/28 ; H01L29/423 ; H01L29/08 ; H01L29/40 ; H01L29/06 ; H01L21/265

Abstract:
Provided are a low-cost semiconductor device manufacturing method and a semiconductor device made using the method. The method includes forming multiple body regions in a semiconductor substrate, forming multiple gate insulating layers and multiple gate electrodes in the body region; implementing a blanket ion implantation in an entire surface of the substrate to form a low concentration doping region (LDD region) in the body region without a mask, forming a spacer at a side wall of the gate electrode, and implementing a high concentration ion implantation to form a high concentration source region and a high concentration drain region around the LDD region. According to the examples, devices have favorable electrical characteristics and at the same time, manufacturing costs are reduced. Since, when forming high concentration source region and drain regions, tilt and rotation co-implants are applied, an LDD masking step is potentially omitted.
Public/Granted literature
- US20170263762A1 LOW-COST SEMICONDUCTOR DEVICE MANUFACTURING METHOD Public/Granted day:2017-09-14
Information query
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