Invention Grant
- Patent Title: Method for producing field-effect transistor
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Application No.: US16131760Application Date: 2018-09-14
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Publication No.: US10586873B2Publication Date: 2020-03-10
- Inventor: Shinji Matsumoto , Naoyuki Ueda , Yuki Nakamura , Yukiko Abe , Yuji Sone , Ryoichi Saotome , Sadanori Arae , Minehide Kusayanagi
- Applicant: Shinji Matsumoto , Naoyuki Ueda , Yuki Nakamura , Yukiko Abe , Yuji Sone , Ryoichi Saotome , Sadanori Arae , Minehide Kusayanagi
- Applicant Address: JP Tokyo
- Assignee: Ricoh Company, Ltd.
- Current Assignee: Ricoh Company, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2016-055630 20160318; JP2017-038178 20170301
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/16 ; H01L29/786 ; H01L21/02 ; H01L27/12 ; H01L29/04 ; H01L29/24 ; H01L51/00

Abstract:
A method for producing a field-effect transistor including first-oxide-layer and second-oxide-layer and forming front-channel or back-channel in region where the first-oxide-layer and the second-oxide-layer are adjacent to each other, the method including: forming second-precursor-layer, which is precursor of the second-oxide-layer, so as to be in contact with first-precursor-layer, which is precursor of the first-oxide-layer, and then converting the first-precursor-layer and the second-precursor-layer to the first-oxide-layer and the second-oxide-layer, respectively, the forming includes at least one of treatments (I) and (II) below: (I) treatment of: coating first-oxide-precursor-forming coating liquid that can form precursor of first oxide and contains solvent; and then removing the solvent to form the first-precursor-layer which is the precursor of the first-oxide-layer; and (II) treatment of: coating second-oxide-precursor-forming coating liquid that can form precursor of second oxide and contains solvent; and then removing the solvent to form the second-precursor-layer which is the precursor of the second-oxide-layer.
Public/Granted literature
- US20190027608A1 METHOD FOR PRODUCING FIELD-EFFECT TRANSISTOR Public/Granted day:2019-01-24
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