Invention Grant
- Patent Title: Thin film transistor and manufacturing method thereof
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Application No.: US15528742Application Date: 2017-04-20
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Publication No.: US10586874B2Publication Date: 2020-03-10
- Inventor: Huafei Xie
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd
- Current Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- Priority: CN201710181508 20170324
- International Application: PCT/CN2017/081241 WO 20170420
- International Announcement: WO2018/170985 WO 20180927
- Main IPC: H01L29/786
- IPC: H01L29/786 ; B82Y10/00 ; B82Y40/00 ; H01L29/66 ; H01L21/02 ; H01L29/15 ; H01L29/16 ; H01L29/06

Abstract:
The disclosure discloses a thin film transistor and a manufacturing method thereof. The method includes depositing quantum dot ink containing carbon quantum dots in a groove region between a source electrode and a drain electrode, after the quantum dot ink is dry, cleaning and blow-drying the dried quantum dot ink to film the carbon quantum dots to be an active layer of the thin film transistor. Accordingly, the disclosure can simplify the manufacturing process of the thin film transistor and enhance the production efficiency, as well as reducing costs and improving control sensitivity.
Public/Granted literature
- US20190097065A1 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-03-28
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