Invention Grant
- Patent Title: High power RF switches using multiple optimized transistors and methods for fabricating same
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Application No.: US16025996Application Date: 2018-07-02
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Publication No.: US10587233B2Publication Date: 2020-03-10
- Inventor: Paul D. Hurwitz , Roda Kanawati
- Applicant: Newport Fab, LLC
- Applicant Address: US CA Newport Beach
- Assignee: Newport Fab, LLC
- Current Assignee: Newport Fab, LLC
- Current Assignee Address: US CA Newport Beach
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: H03F3/24
- IPC: H03F3/24 ; H01L27/12 ; H01L21/84 ; H01L29/78 ; H01L29/10 ; H03K17/10 ; H01L29/786 ; H01L21/265 ; H01L21/8234

Abstract:
An RF switch includes series-connected transistors having different threshold voltages, breakdown voltages and on-resistances, without relying on different channel lengths to provide these differences. A first set of transistors located near a power amplifier output are fabricated to have first channel regions with relatively high dopant concentrations. A second set of transistors located near an antenna input, are fabricated to have second channel regions with relatively low dopant concentrations. The first set of transistors can also include halo implants to increase the dopant concentrations in the first channel regions. Lightly doped drain (LDD) regions of the first set of transistors can have a lower dopant concentration (and be shallower) than LDD regions of the second set of transistors. Transistors in the first set have a relatively high on-resistance, a relatively high breakdown voltage and a relatively high threshold voltage, when compared with transistors in the second set.
Public/Granted literature
- US20180323757A1 HIGH POWER RF SWITCHES USING MULTIPLE OPTIMIZED TRANSISTORS Public/Granted day:2018-11-08
Information query
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