A semiconductor microwave oven and a semiconductor microwave source thereof. The semiconductor microwave oven includes: a body, a microwave input device, a semiconductor microwave source and a control device. The semiconductor microwave source includes a signal source, a power divider and N drive amplifiers. The signal source is configured to generate a first microwave signal. Power of the first microwave signal is allocated by the power divider to generate N second microwave signals. Each drive amplifier is configured to conduct drive amplification on the second microwave signal, and respectively to input same to the microwave input device to transmit into the chamber. The control device is configured to control the signal source to generate the first microwave signal. The microwave oven shares one signal source to guarantee operating at the same frequency, thereby realizing the highly efficient power output.