Invention Grant
- Patent Title: Radiation source having debris control
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Application No.: US15035983Application Date: 2014-10-23
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Publication No.: US10588211B2Publication Date: 2020-03-10
- Inventor: Rolf Theodorus Nicolaas Beijsens , Kornelis Frits Feenstra , Arjen Teake De Jong , Reinier Theodorus Martinus Jilisen , Niek Antonius Jacobus Maria Kleemans , Andrey Nikipelov , Pavel Seroglazov , Nicolaas Antonius Allegondus Johannes Van Asten , Harald Ernest Verbraak
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2014/072753 WO 20141023
- International Announcement: WO2015/071066 WO 20150521
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
A radiation system to generate a radiation emitting plasma, the radiation system include a fuel emitter to provide a fuel target at a plasma formation region, a first laser arranged to provide a first laser beam at the plasma formation region incident on the fuel target to generate a radiation emitting plasma, an imaging device arranged to obtain a first image of the radiation emitting plasma at the plasma formation region, the first image indicating at least one image property of the radiation emitting plasma, and a controller. The controller is arranged to receive the first image, and to generate at least one instruction based on the at least one image property of the radiation emitting plasma to modify operation of at least one component of the radiation system to reduce a detrimental effect of debris.
Public/Granted literature
- US20160278196A1 RADIATION SOURCE Public/Granted day:2016-09-22
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