Invention Grant
- Patent Title: Isolated protrusion/recession features in a micro electro mechanical system
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Application No.: US15481704Application Date: 2017-04-07
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Publication No.: US10589980B2Publication Date: 2020-03-17
- Inventor: Patrick Ian Oden , James Carl Baker , Sandra Zheng , William C. McDonald
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Charles A. Brill; Frank D. Cimino
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G02B26/08

Abstract:
In described examples, a microelectromechanical system (MEMS) includes a first element and a second element. The first element is mounted on a substrate and has a first contact surface. The second element is mounted on the substrate and has a second contact surface that protrudes from the second element to form an acute contact surface. The first element and/or the second element is/are operable to move in: a first direction, such that the first contact surface comes in contact with the second contact surface; and a second direction, such that the second contact surface separates from the first contact surface.
Public/Granted literature
- US20180290880A1 Isolated Protrusion/Recession Features in a Micro Electro Mechanical System Public/Granted day:2018-10-11
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