Invention Grant
- Patent Title: MEMS devices and processes
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Application No.: US15924876Application Date: 2018-03-19
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Publication No.: US10589984B2Publication Date: 2020-03-17
- Inventor: Marek Sebastian Piechocinski
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Priority: GB1707195.2 20170505
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H04R3/00 ; H04R19/00 ; H04R19/04 ; H04R31/00 ; H04R7/06
Abstract:
The application relates to MEMS microphone transducers having a vent structure provided in the membrane layer and an opening formed at the vent structure for tuning the frequency response of the microphone.
Public/Granted literature
- US20180273372A1 MEMS DEVICES AND PROCESSES Public/Granted day:2018-09-27
Information query
