Invention Grant
- Patent Title: Device for coating extra-long sheet-type substrates, in particular glass panes, in a vacuum coating system
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Application No.: US15767477Application Date: 2016-10-20
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Publication No.: US10590528B2Publication Date: 2020-03-17
- Inventor: Olaf Gawer , Holger Richert , Jens Ellrich
- Applicant: GRENZEBACH MASCHINENBAU GMBH
- Applicant Address: DE Asbach-Baeumenheim
- Assignee: GRENZEBACH MASCHINENBAU GMBH
- Current Assignee: GRENZEBACH MASCHINENBAU GMBH
- Current Assignee Address: DE Asbach-Baeumenheim
- Agency: Duane Morris LLP
- Agent J. Rodman Steele, Jr.; Gregory M. Lefkowitz
- Priority: DE102015013799 20151026
- International Application: PCT/DE2016/000376 WO 20161020
- International Announcement: WO2017/071677 WO 20170504
- Main IPC: C23C14/54
- IPC: C23C14/54 ; C23C14/56

Abstract:
A device for coating sheet-type substrates, in particular glass panes, in a vacuum coating system is described. The system includes a) a series connection of chambers, through which each substrate sheet passes and which are arranged on the entry side, namely a load lock chamber, a buffer chamber and a transfer chamber, each of which is vacuum-sealable by a check valve. An area of process chambers follows the transfer chamber and the process chamber is followed by a transfer chamber, buffer chamber and load lock chamber. The system also includes b) a conveyor device; c) a vacuum pump with an adapter flange in the region of the buffer chamber; d) at least two flow baffles in the buffer chamber; e) a system for the longitudinal and height displacement of the flow baffles; and f) an assembly for controlling the dynamic processes.
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