A turbo-molecular pump comprises a cylindrical rotor to be rotatably driven by a motor; a cylindrical stator provided corresponding to the rotor; a heater configured to elevate a temperature of the stator to a target temperature; a temperature sensor configured to detect the temperature of the stator; and a control section. A rotation start command is input after start of energization of the heater, the control section stops rotary driving of the rotor at a rated rotation speed until the temperature of the stator reaches a predetermined temperature set lower than the target temperature and begins the rotary driving at the rated rotation speed when the temperature of the stator exceeds the predetermined temperature.