Invention Grant
- Patent Title: Accelerometric sensor in MEMS technology having high accuracy and low sensitivity to temperature and ageing
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Application No.: US15280720Application Date: 2016-09-29
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Publication No.: US10591505B2Publication Date: 2020-03-17
- Inventor: Alessandro Tocchio , Francesco Rizzini , Carlo Valzasina , Giacomo Langfelder
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.R.L.
- Current Assignee: STMicroelectronics S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102016000033296 20160331
- Main IPC: G01P1/00
- IPC: G01P1/00 ; G01P15/125

Abstract:
The accelerometric sensor has a suspended region, mobile with respect to a supporting structure, and a sensing assembly coupled to the suspended region and configured to detect a movement of the suspended region with respect to the supporting structure. The suspended region has a geometry variable between at least two configurations associated with respective centroids, different from each other. The suspended region is formed by a first region rotatably anchored to the supporting structure and by a second region coupled to the first region through elastic connection elements configured to allow a relative movement of the second region with respect to the first region. A driving assembly is coupled to the second region so as to control the relative movement of the latter with respect to the first region.
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