Invention Grant
- Patent Title: Capacitive sensor and manufacturing method thereof
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Application No.: US15507143Application Date: 2015-05-26
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Publication No.: US10591523B2Publication Date: 2020-03-17
- Inventor: James Jungho Pak , Dae Seok Na
- Applicant: Korea University Research and Business Foundation
- Applicant Address: KR Seoul
- Assignee: Korea University Research and Business Foundation
- Current Assignee: Korea University Research and Business Foundation
- Current Assignee Address: KR Seoul
- Agency: NSIP Law
- Priority: KR10-2014-0113951 20140829; KR10-2014-0173486 20141205
- International Application: PCT/KR2015/005222 WO 20150526
- International Announcement: WO2016/032093 WO 20160303
- Main IPC: G01R27/26
- IPC: G01R27/26 ; G01D5/24 ; G01N33/30 ; H01L21/306 ; H01L21/31
Abstract:
A capacitive sensor is disclosed. The capacitive sensor includes a substrate, a first electrode and a second electrode formed on the substrate, an insulation layer formed on the substrate on which the first electrode and the second electrode are formed, and a sensing layer that is formed on the insulation layer and includes graphene.
Public/Granted literature
- US20170276711A1 CAPACITIVE SENSOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2017-09-28
Information query
