Invention Grant
- Patent Title: Encoder head with a birefringent lens element and exposure system utilizing the same
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Application No.: US15889412Application Date: 2018-02-06
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Publication No.: US10591826B2Publication Date: 2020-03-17
- Inventor: Eric Peter Goodwin
- Applicant: Nikon Corporation
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Quarles & Brady LLP
- Agent Yakov Sidorin
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B27/28 ; G02B19/00 ; G02B1/08 ; G01D5/347

Abstract:
An encoder head configured for use with a lithographic exposure tool. The head is devoid of the multiplicity of optical corner-cubes and includes, instead, a single, geometrically substantially perfect cuboid of optically-isotropic material complemented, in operation, with a birefringent lens to form a contraption that, as a unit, splits a single beam of light delivered to the contraption into four measurement (sub-)beams of light (two in xz-plane, two in yz-plane) and causes each of measurement sub-beams to interact with the wafer-stage diffraction grating at the same location twice: upon the first pass by the grating and upon the second pass by the grating. The use of the contraption solves problems of (i) structural complexity of a conventional encoder head for use in an exposure tool, (ii) burdensome alignment of the multitude of optical prisms in the process of forming such encoder head, and (iii) cyclic non-linear errors associated with measurements involving conventional corner-cubes-based encoder heads while, at the same time, reducing the geometrical footprint of the encoder head. The contraption is complemented with a birefringent prismatic element positioned across the axis of the contraption between the cuboid and the birefringent lens.
Public/Granted literature
- US20180181006A1 ENCODER HEAD WITH A BIREFRINGENT LENS ELEMENT AND EXPOSURE SYSTEM UTILIZING THE SAME Public/Granted day:2018-06-28
Information query
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