Invention Grant
- Patent Title: Niobium oxide sintered compact, sputtering target formed from said sintered compact, and method of producing niobium oxide sintered compact
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Application No.: US15516954Application Date: 2015-09-14
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Publication No.: US10593524B2Publication Date: 2020-03-17
- Inventor: Satoyasu Narita
- Applicant: JX Nippon Mining & Metals Corporation
- Applicant Address: JP Tokyo
- Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JP2014-205389 20141006
- International Application: PCT/JP2015/075952 WO 20150914
- International Announcement: WO2016/056352 WO 20160414
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34 ; C23C14/08 ; C04B35/495 ; C04B35/626 ; C04B35/645
Abstract:
The present invention provides a niobium oxide sintered compact having a composition of NbOx (2
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